DR. HANH HONG HA, D.D.S.
Dentist at Bird Ave, San Jose, CA
License number
California CA42916
Category
Dentist
Type
General Practice
Address
Address
1409 Bird Ave STE F, San Jose, CA 95125
Phone
(408) 297-8505
(408) 297-2373 (Fax)
(408) 297-2373 (Fax)
Organization information
See more information about HANH HONG HA at bizstanding.comBird Ave Dental Care
1419 Bird Ave, San Jose, CA 95125
Industry:
Dentist's Office
Doing business as:
Bird Avenue Dental Care<br>Bird Avenue Dental Care - Hanh Hong Ha DDS
Phone:
(408) 297-8505 (Phone)
Principal, Family And General Dentistry:
Hahn Hah (Principal, Family And General Dentistry)
Categories:
Dentists
Professional information
Dr. Hanh H Ha, San Jose CA - DDS (Doctor of Dental Surgery)
Specialties:
Dentistry
Address:
1419 Bird Ave, San Jose 95125
(408) 297-8505 (Phone), (408) 297-2373 (Fax)
(408) 297-8505 (Phone), (408) 297-2373 (Fax)
Languages:
English
Hanh Hong Ha, San Jose CA
Specialties:
Dentist
Address:
1409 Bird Ave, San Jose, CA 95125
Lower Electrode Assembly Of Plasma Processing Chamber
US Patent:
2010010, May 6, 2010
Filed:
Oct 30, 2009
Appl. No.:
12/609377
Inventors:
Jason Augustino - Fremont CA, US
Quan Chau - San Jose CA, US
Keith William Gaff - Fremont CA, US
Hanh Tuong Ha - San Jose CA, US
Brett C. Richardson - San Ramon CA, US
Harmeet Singh - Fremont CA, US
Quan Chau - San Jose CA, US
Keith William Gaff - Fremont CA, US
Hanh Tuong Ha - San Jose CA, US
Brett C. Richardson - San Ramon CA, US
Harmeet Singh - Fremont CA, US
Assignee:
Lam Research Corporation - Fremont CA
International Classification:
C23F 1/08, H01L 21/306
US Classification:
1563451
Abstract:
A lower electrode assembly for use in a plasma processing chamber comprises a metal base and upper and lower edge rings. The metal base comprises metal plates brazed together and forming a brazed line on a lower side surface of the base, an edge ring support surface extending horizontally inwardly from the lower side surface and an upper side surface above the edge ring support surface. The upper edge ring comprises a lower surface mounted on the edge ring support surface and the lower edge ring surrounds the lower side surface of the base with a gap between opposed surfaces of the upper and lower edge rings and between the lower edge ring and the outer periphery of the base. The gap has an aspect ratio of total gap length to average gap width sufficient to impede arcing at the location of the braze line.