TIMOTHY JOHN RONAN
Pilots at Luning Dr, San Jose, CA
License number
California A2643699
Issued Date
Apr 2015
Expiration Date
Apr 2017
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
1442 Luning Dr, San Jose, CA 95118
Professional information
Contaminant Reducing Substrate Transport And Support System
US Patent:
2005025, Nov 17, 2005
Filed:
Feb 23, 2005
Appl. No.:
11/065702
Inventors:
Vijay Parkhe - San Jose CA, US
Matthew Leopold - Ithaca NY, US
Timothy Ronan - San Jose CA, US
Todd Martin - Mountain View CA, US
Edward Ng - San Jose CA, US
Nitin Khurana - Milpitas CA, US
Song-Moon Suh - Sunnyvale CA, US
Richard Fay - San Jose CA, US
Christopher Hagerty - Aptos CA, US
Michael Rice - Pleasanton CA, US
Darryl Angelo - Sunnyvale CA, US
Kurt Ahman - San Jose CA, US
Matthew Tsai - Cupertino CA, US
Steve Sansoni - Livermore CA, US
Matthew Leopold - Ithaca NY, US
Timothy Ronan - San Jose CA, US
Todd Martin - Mountain View CA, US
Edward Ng - San Jose CA, US
Nitin Khurana - Milpitas CA, US
Song-Moon Suh - Sunnyvale CA, US
Richard Fay - San Jose CA, US
Christopher Hagerty - Aptos CA, US
Michael Rice - Pleasanton CA, US
Darryl Angelo - Sunnyvale CA, US
Kurt Ahman - San Jose CA, US
Matthew Tsai - Cupertino CA, US
Steve Sansoni - Livermore CA, US
International Classification:
C23C016/00
US Classification:
118729000
Abstract:
A lifting assembly can lift a substrate from a substrate support and transport the substrate. The lift assembly has a hoop sized to fit about a periphery of the substrate support, and a pair of arcuate fins mounted on the hoop, each arcuate fin comprising a pair of opposing ends having ledges that extend radially inward, each ledge having a raised protrusion to lift a substrate so that the substrate contacts substantially only the raised protrusion, thereby minimizing contact with the ledge, when the pair of fins is used to lift the substrate off the substrate support. The lifting assembly and other process chamber components can have a diamond-like coating having interlinked networks of (i) carbon and hydrogen, and (ii) silicon and oxygen. The diamond-like coating has a contact surface having a coefficient of friction of less than about 0.3, a hardness of at least about 8 GPa, and a metal concentration level of less than about 5×10atoms/cmof metal. The contact surface reduces contamination of a substrate when directly or indirectly contacting a substrate.
Substrate Support Components Having Quartz Contact Tips
US Patent:
2008010, May 8, 2008
Filed:
Oct 29, 2007
Appl. No.:
11/927120
Inventors:
TIMOTHY RONAN - San Jose CA, US
Yuanhong Guo - San Jose CA, US
Robert Decottignies - Redwood City CA, US
Todd W. Martin - Mountain View CA, US
Darryl K. Angelo - Sunnyvale CA, US
Song-Moon Suh - San Jose CA, US
Nitin Khurana - Milpitas CA, US
Edward Ng - San Jose CA, US
Yuanhong Guo - San Jose CA, US
Robert Decottignies - Redwood City CA, US
Todd W. Martin - Mountain View CA, US
Darryl K. Angelo - Sunnyvale CA, US
Song-Moon Suh - San Jose CA, US
Nitin Khurana - Milpitas CA, US
Edward Ng - San Jose CA, US
International Classification:
B05C 13/00
US Classification:
118500
Abstract:
A support component comprises a support structure having a support surface with one or more quartz contact tips. In one version, the support component comprises a robot blade capable of transferring a substrate into and out of a chamber. The robot blade comprises a plate having a plurality of raised mesas, each raised mesa comprising a quartz contact tip which minimizes contact with the substrate thereby generating fewer contaminant particles during substrate transportation. Other versions of the support component include a heat exchange pedestal, lift pin assembly, and lifting fin assembly.