ROBERT A BROWNE
Accountancy in San Jose, CA
License number
Massachusetts 23889
Issued Date
Jan 19, 2006
Expiration Date
Jun 30, 2011
Type
Certified Public Accountant
Address
Address
San Jose, CA 95125
Professional information
Paddle Design For Plating Bath
US Patent:
6379511, Apr 30, 2002
Filed:
Sep 23, 1999
Appl. No.:
09/401756
Inventors:
Joseph J. Fatula - San Jose CA
Robert M. Browne - San Jose CA
Robert M. Browne - San Jose CA
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
C25D 1700
US Classification:
204222
Abstract:
An electroplating system circulates solution between an anode and a workpiece mounted to a cathode. A shaped agitation paddle is reciprocated immediately adjacent to the cathode workpiece to improve performance of the system. The paddle is an elongated prism having a generally flat side that is parallel to the workpiece. The flat side has a fluid port connected to a pump. The solution may be pumped with either positive pressure to force the solution against the surface of the workpiece, or negative pressure to draw the solution away from the surface of the workpiece. In an alternate embodiment, the cathode workpiece is rotated in the solution above an anode with a stationary, shaped paddle in between them.
Multi-Compartment Eletroplating System
US Patent:
5312532, May 17, 1994
Filed:
Jan 15, 1993
Appl. No.:
8/006070
Inventors:
Panayotis Andricacos - Croton-on-Hudson NY
Moritz Branger - Los Altos CA
Robert M. Browne - San Jose CA
John O. Dukovic - Pleasantville NY
Benjamin W. B. Fu - Cupertino CA
Robert W. Hitzfeld - San Jose CA
Matteo Flotta - Mahopac NY
Donald R. McKenna - San Jose CA
Lubomyr T. Romankiw - Briarcliff Manor NY
Saeed Sahami - San Jose CA
Moritz Branger - Los Altos CA
Robert M. Browne - San Jose CA
John O. Dukovic - Pleasantville NY
Benjamin W. B. Fu - Cupertino CA
Robert W. Hitzfeld - San Jose CA
Matteo Flotta - Mahopac NY
Donald R. McKenna - San Jose CA
Lubomyr T. Romankiw - Briarcliff Manor NY
Saeed Sahami - San Jose CA
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
C25D 1702, C25D 1710, C25D 2110, C25D 2112
US Classification:
204231
Abstract:
A multi-compartment electroplating system for electroplating two or more objects simultaneously such that the electrodeposited material is substantially uniform in thickness and composition. Electroplating solution is circulated between a reservoir and a multi-compartment tank which has one cathode-paddle-anode (CPA) assembly for each compartment. Each CPA assembly has an anode, a cathode adapted for holding a wafer and employing a single thieving electrode which covers all of the floor of the compartment not covered by the wafer, and a paddle. Also included is a cover which houses a single linear motor for driving all of the paddles in synchrony.
Cam Driven Paddle Assembly For A Plating Cell
US Patent:
6955747, Oct 18, 2005
Filed:
Sep 23, 2002
Appl. No.:
10/253249
Inventors:
Robert M. Browne - San Jose CA, US
Donald G. Allen - Morgan Hill CA, US
Hank Reinstein - Livermore CA, US
Todd Thomas - Danville CA, US
Donald G. Allen - Morgan Hill CA, US
Hank Reinstein - Livermore CA, US
Todd Thomas - Danville CA, US
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
C25D007/12, C25D017/02
US Classification:
204273
Abstract:
The present invention overcomes the drawbacks and limitations described above by providing a paddle assembly having a paddle that moves in a bidirectional fashion for agitating solution in a container of a plating cell. A follower is coupled to the paddle. The follower engages a rotatable cam and is propelled along the cam as the cam rotates. A drive mechanism rotates the cam.