Inventors:
Scott Howard Williams - Pleasanton CA, US
Richard William Campbell - Reinholds PA, US
Stephan Glander - Wettswil, CH
Assignee:
QUADRANT EPP AG - Lenzburg
International Classification:
H01L 21/306, C08G 6/00, H05H 1/48, C08G 73/06, C08G 75/14, C08G 73/14, C08G 73/10, C08G 75/20
US Classification:
204164, 15634543, 528322, 528220, 528373, 528423, 528 73
Abstract:
Internal components of plasma reactors are composed of a toleratable, ceramic filled plasma-useful polymer such as a high temperature engineering thermoplastic, preferably a polyamideimide. The parts exhibit a low erosion rate upon exposure to plasma at low pressure.