Inventors:
Peter Smeys - Mountain View CA, US
Peter Johnson - Sunnyvale CA, US
Peter Deane - Moss Beach CA, US
Assignee:
National Semiconductor Corporation - Santa Clara CA
International Classification:
H01L 23/04, H01L 23/12, H01L 23/053, H01L 23/34
US Classification:
257698, 257415, 257700, 257713, 257723, 257724, 257E21499, 257E21506, 257E21536, 257E21705
Abstract:
In one aspect, an integrated circuit package composed of a plurality of immediately adjacent stacked layers of cured, planarizing, photo-imageable dielectric is described. At least one interconnect layer is provided between a pair of adjacent dielectric layers. An integrated circuit is positioned within one or more of the dielectric layers such that at least one of the dielectric layers extends over the active surface of the integrated circuit. The integrated circuit is electrically coupled with I/O pads on a surface of the package at least in part through the interconnect layer or electrically conductive vias. In particular embodiments, the package can include thermal pipes, a heat sink, multiple integrated circuits, interconnect layers, conductive vias that electrically connect different components of the package and/or passive devices. In some specific embodiments, the dielectric layers are formed from a suitable epoxy such as SU-8 type. In a method aspect of the invention, the dielectric layers may be formed using a spin-on coating approach and patterned using conventional photolithographic techniques.