PAUL J SACCHETTI
Engineers in Warrington, PA
License number
Pennsylvania PE040727E
Category
Engineers
Type
Professional Engineer
Address
Address
Warrington, PA 18976
Professional information
Method For Manufacturing Chemical Mechanical Polishing Pad Polishing Layers Having Reduced Gas Inclusion Defects
US Patent:
2010026, Oct 28, 2010
Filed:
Jun 23, 2009
Appl. No.:
12/490009
Inventors:
John Esbenshade - Clayton DE, US
Andrew M. Geiger - Newark DE, US
Paul Libbers - Claymont DE, US
Samuel J. November - Newtown PA, US
Paul J. Sacchetti - Warrington PA, US
Jonathan Tracy - Kennett Square PA, US
David Verbaro - Cinnaminson NJ, US
Michael E. Watkins - Bear DE, US
Andrew M. Geiger - Newark DE, US
Paul Libbers - Claymont DE, US
Samuel J. November - Newtown PA, US
Paul J. Sacchetti - Warrington PA, US
Jonathan Tracy - Kennett Square PA, US
David Verbaro - Cinnaminson NJ, US
Michael E. Watkins - Bear DE, US
Assignee:
Rohm and Haas Electroinic Materials CMP Holidays, Inc. - Newark DE
International Classification:
B24D 3/00, B01F 13/02
US Classification:
51298, 366102
Abstract:
A method for manufacturing chemical mechanical polishing pad polishing layers that minimizes entrained gas inclusion defects is provided. Also provided is a mix head assembly for use in the manufacture of chemical mechanical polishing pad polishing layers, wherein inclusions of entrained gas inclusion defects are minimized.
Mix Head Assembly For Forming Chemical Mechanical Polishing Pads
US Patent:
8118897, Feb 21, 2012
Filed:
Apr 11, 2011
Appl. No.:
13/084159
Inventors:
John Esbenshade - Clayton DE, US
Andrew M Geiger - Newark DE, US
Paul Libbers - Claymont DE, US
Samuel J November - Newtown PA, US
Paul J Sacchetti - Warrington PA, US
Jonathan Tracy - Kennett Square PA, US
David Verbaro - Cinnaminson NJ, US
Michael E Watkins - Bear DE, US
Andrew M Geiger - Newark DE, US
Paul Libbers - Claymont DE, US
Samuel J November - Newtown PA, US
Paul J Sacchetti - Warrington PA, US
Jonathan Tracy - Kennett Square PA, US
David Verbaro - Cinnaminson NJ, US
Michael E Watkins - Bear DE, US
Assignee:
Rohm and Haas Electronic Materials CMP Holdings, Inc. - Newark DE
International Classification:
C09K 3/14
US Classification:
51298, 366101, 366102, 366136, 366137, 451 59, 451526, 451528, 111612
Abstract:
A mix head assembly for use in the manufacture of chemical mechanical polishing pad polishing layers is provided, wherein inclusions of entrained gas inclusion defects are minimized.