MICHAEL P CALLAHAN
Broker in Bedford, MA

License number
Massachusetts 63115
Issued Date
Apr 1, 1985
Expiration Date
Mar 17, 1992
Type
Salesperson
Address
Address
Bedford, MA 01730

Professional information

Michael Callahan Photo 1

Forming Metal Nitrides

US Patent:
6676752, Jan 13, 2004
Filed:
Feb 26, 2002
Appl. No.:
10/083614
Inventors:
Michael J. Suscavage - Shirley MA
David F. Bliss - Arlington MA
Michael J. Callahan - Bedford MA
Gerald W. Iseler - Chelmsford MA
John S. Bailey - Temple NH
Assignee:
The United States of America as represented by the Secretary of the Air Force - Washington DC
International Classification:
C30B 2306
US Classification:
117104, 117952, 20429812, 20429814, 42725536, 427255394
Abstract:
Method and apparatus are provided for forming metal nitrides (MN) wherein M is contacted with iodine vapor or hydrogen iodide (HI) vapor to form metal iodide (MI) and contacting MI with ammonia to form the MN in a process of reduced or no toxicity. MN is then deposited on a substrate, on one or more seeds or it can self nucleate on the walls of a growth chamber, to form high purity metal nitride material. The inventive MN material finds use in semiconductor materials and in making nitride electronic devices as well as other uses.