LARRY M BEASLEY
Massage Therapy at End Of The Trl, Austin, TX
License number
Florida 49207
Issued Date
Jan 11, 2007
Effective Date
Jan 11, 2007
Expiration Date
Aug 31, 2017
Category
Health Care
Type
Massage Therapist
Address
Address
6102 End Of The Trl, Austin, TX 78734
Phone
(512) 699-9397
Professional information
Vertical Thermal Processor For Semiconductor Wafers
US Patent:
5000682, Mar 19, 1991
Filed:
Jan 22, 1990
Appl. No.:
7/467937
Inventors:
Donald W. Heidt - Whitewright TX
Steve Thompson - Kalispell MT
Worm Lund - Seattle WA
Raymon F. Thompson - Kalispell MT
Larry M. Beasley - Austin TX
Steve Thompson - Kalispell MT
Worm Lund - Seattle WA
Raymon F. Thompson - Kalispell MT
Larry M. Beasley - Austin TX
Assignee:
Semitherm - Kalispell MT
International Classification:
F27D 312
US Classification:
432241
Abstract:
Semiconductor wafers within a supporting vertical wafer tower are positioned within a vertical process chamber through a lower gate valve fixed to a supporting framework. The gate valve is sealed to a similar gate valve at the upper end of a movable load lock on the framework, within which the wafers are subjected to pre-treatment and post-treatment processes. Two load locks are alternately used in conjunction with the process chamber and a wafer loading station on the framework. In addition, a cleaning element is movably mounted on the framework for periodically maintaining the interior surfaces of the process tube within the process chamber.