Inventors:
Alan W. Weimer - Niwot CO, US
Xinhua Liang - Rolla MO, US
Jianhua Li - Superior CO, US
John L. Falconer - Boulder CO, US
Miao Yu - Pittsford NY, US
International Classification:
A61K 9/00, B05D 3/00, B32B 5/18, B01J 35/10, B05D 5/00, A23L 1/29, B82Y 40/00, B82Y 30/00, B82Y 5/00, B82Y 15/00
US Classification:
424400, 427243, 427 21, 4283122, 4283044, 426 89, 426 2, 4283128, 502100, 977755, 977915, 977953, 977890
Abstract:
Ultra-thin porous films are deposited on a substrate in a process that includes laying down an organic polymer, inorganic material or inorganic-organic material via an atomic layer deposition or molecular layer deposition technique, and then treating the resulting film to introduce pores. The films are characterized in having extremely small thicknesses of pores that are typically well less than 50 nm in size.