JOHN DAVID WEST
Pilots at Leeward Dr, Plano, TX
License number
Texas A2032645
Issued Date
Jan 2017
Expiration Date
Jul 2017
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
486 Leeward Dr, Plano, TX 75094
Professional information
Focused Ion Beam Circuit Repair Using A Hardmask And Wet Chemistry
US Patent:
2005019, Sep 1, 2005
Filed:
Mar 1, 2004
Appl. No.:
10/791461
Inventors:
Henry Edwards - Garland TX, US
Jeffrey Large - Dallas TX, US
John West - Plano TX, US
Jeffrey Large - Dallas TX, US
John West - Plano TX, US
International Classification:
H01L021/00
US Classification:
438004000
Abstract:
An embodiment of the invention is a method of integrated circuit repair that includes removing the top dielectric layer in at least one location using a FIB and etching exposed areas of a top metal layer using a wet chemistry process. This method also includes etching selected portions of one or more dielectric interconnect layers using a FIB, and then using a FIB to either cut a selected portion of a metal interconnect layer or connect a selected portion of a metal interconnect layer Another embodiment of the invention is a method of integrated circuit repair that forms a top dielectric layer over the circuit and then removes the top dielectric layer in at least one location using a FIB. The exposed areas of a top metal layer are etched using a wet chemistry process. Selected portions of one or more dielectric interconnect layers are etched using a FIB, and then a FIB is used to either cut a selected portion of a metal interconnect layer or connect a selected portion of a metal interconnect layer