Inventors:
Mukta Ghate Farooq - Hopewell Junction NY, US
Jasvir Singh Jaspal - Poughkeepsie NY, US
William Francis Landers - Wappingers Falls NY, US
Thomas E. Lombardi - Poughkeepsie NY, US
Hai Pham Longworth - Poughkeepsie NY, US
H. Bernhard Pogge - Hopewell Junction NY, US
Roger A. Quon - Rhinebeck NY, US
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L 21/44, H01L 23/48, H01L 23/52, H01L 29/40
US Classification:
438653, 438613, 438614, 257738, 257751
Abstract:
A system and method comprises depositing a dielectric layer on a substrate and depositing a metal layer on the dielectric layer. The system and method further includes depositing a high temperature diffusion barrier metal cap on the metal layer. The system and method further includes depositing a second dielectric layer on the high temperature diffusion barrier metal cap and the first dielectric layer, and etching a via into the second dielectric layer, such that the high temperature diffusion barrier metal cap is exposed. The system and method further includes depositing an under bump metallurgy in the via, and forming a C4 ball on the under bump metallurgy layer.