Inventors:
Jeffrey Squier - Golden CO, US
Dawn Vitek - Lakewood CO, US
David Kleinfeld - San Diego CA, US
Daniel Adams - Golden CO, US
Charles Durfee - Golden CO, US
International Classification:
B23K 15/00, G02B 27/44, G02B 5/04
Abstract:
Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (˜1 mm) features with parallel sidewalls are ablated at high material removal rates.