CONRAD E FUCHS
Engineers in Darbydale, OH

5147521, Sep 15, 1992

May 20, 1991

7/702885

Robert L. Belli - Columbus OH
Martin L. Blazic - Bexley OH
Rick O. Eller - Orient OH
Kenneth B. Fielder - Circleville OH
Conrad E. Fuchs - Grove City OH

Tosoh SMD, Inc. - Grove City OH

C23C 1434

20429812

A sputtering target assembly is disclosed having a sputtering gun with an inner and outer annular wall, where the inner annular wall has a plurality of radially projecting set screws, threadably movable within threaded apertures in the inner annular wall. A mounting ring is profiled to fit over the inner annular wall, the mounting ring having a recessed grove, into which the set screws are received, to secure the mounting ring. The mounting ring includes a plurality of radially disposed spring plungers which are threadably installed in threaded apertures in the mounting ring. The target has a grooved inner annular surface for receiving the spring ball plungers, whereby the target is retained to the sputtering gun.

4820397, Apr 11, 1989

Apr 4, 1988

7/176911

Kenneth B. Fielder - Columbus OH
Robert L. Belli - Columbus OH
Conrad E. Fuchs - Grove City OH

Tosoh SMD, Inc. - Grove City OH

C23C 1434

204298

A sputter source of the type which relies on thermal expansion of an annular sputter target to make good physical contact with a peripheral cooling wall is disclosed. Novel means are provided for holding the sputter target in place in the source when the source and target are at ambient temperature. In a preferred embodiment of the invention the holding means comprises spring means which cooperate with a groove in either an inner or outer rim of the sputter target. By the application of a sufficient axial force on the target, the gripping force of the spring means is overcome and the target can be removed or inserted. Also shown is a structure which can be used to retrofit the novel quick change target into an existing sputter source.