Inventors:
Alexei Sadovnikov - Sunnyvale CA
Christopher John Knorr - Los Gatos CA
Assignee:
National Semiconductor Corporation - Santa Clara CA
International Classification:
H01L 21336
US Classification:
438197, 438205, 438313, 438340, 438339, 257565, 257593, 257E21371, 257E29044, 257E29193, 257197
Abstract:
A high frequency bipolar transistor that has a silicon germanium intrinsic base region is formed in a semiconductor fabrication process that forms the extrinsic base regions after the intrinsic base region has been formed. The extrinsic base regions are epitaxially grown single crystal silicon that is doped during the growth.