COREY MARTIN DUNSKY
Pilots at Broadway, Los Gatos, CA
License number
California A5186920
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
72 Broadway, Los Gatos, CA 95030
Professional information
Micromachining With High-Energy, Intra-Cavity Q-Switched Co2 Laser Pulses
US Patent:
6784399, Aug 31, 2004
Filed:
May 9, 2002
Appl. No.:
10/143040
Inventors:
Corey M. Dunsky - Los Gatos CA
Hisashi Matsumoto - Hillsboro OR
Richard S. Harris - Portland OR
John T. Kennedy - Granby CT
Vernon A. Seguin - Windsor CT
Leon Newman - Glastonbury CT
Hisashi Matsumoto - Hillsboro OR
Richard S. Harris - Portland OR
John T. Kennedy - Granby CT
Vernon A. Seguin - Windsor CT
Leon Newman - Glastonbury CT
Assignee:
Electro Scientific Industries, Inc. - Portland OR
Coherent, Inc. - Santa Clara CA
Coherent, Inc. - Santa Clara CA
International Classification:
B23K 2638
US Classification:
21912168, 21912169
Abstract:
An EOM Q-switched CO laser produces bursts of laser pulses delivered at a high PRF such as 20-140 kHz and having a short high-power spike of about 80-150 ns followed by a lower-power tail of about 0. 05-12. 0 s. The bursts and/or laser pulses can be shaped by controlling the RF pumping duty cycle, the delay between the onset of RF pumping and the initiation of Q-switching, the pulse repetition frequency, and/or the duration of the tail. The bursts of laser pulses can be adapted to facilitate machining of metal layers and/or layers containing materials having disparate vaporization temperatures and/or disparate melting points, such as FR4 or green ceramics.
Beam Shaping And Projection Imaging With Solid State Uv Gaussian Beam To Form Vias
US Patent:
6791060, Sep 14, 2004
Filed:
Dec 19, 2002
Appl. No.:
10/325600
Inventors:
Corey M. Dunsky - Los Gatos CA
Xinbing Liu - Acton MA
Nicholas J. Croglio - Scottsdale AZ
Ho W. Lo - Portland OR
Bryan C. Gundrum - Champaign IL
Hisashi Matsumoto - Hillsboro OR
Xinbing Liu - Acton MA
Nicholas J. Croglio - Scottsdale AZ
Ho W. Lo - Portland OR
Bryan C. Gundrum - Champaign IL
Hisashi Matsumoto - Hillsboro OR
Assignee:
Electro Scientific Industries, Inc. - Portland OR
International Classification:
B23K 2638
US Classification:
2191217, 21912171, 21912173, 21912175
Abstract:
A diode-pumped, solid-state laser ( ) of a laser system ( ) provides ultraviolet Gaussian output ( ) that is converted by a diffractive optical element ( ) into shaped output ( ) having a uniform irradiance profile. A high percentage of the shaped output ( ) is focused through an aperture of a mask ( ) to provide imaged to provide imaged shaped output ( ). The laser system ( ) facilitates a method for increasing the throughput of a via drilling process over that available with an analogous clipped Gaussian laser system. This method is particularly advantageous for drilling blind vias ( ) that have better edge, bottom, and taper qualities than those produced by a clipped Gaussian laser system. An alternative laser system ( ) employs a pair of beam diverting galvanometer mirrors ( ) that directs the Gaussian output around a shaped imaging system ( ) that includes a diffractive optical element ( ) and a mask ( ). Laser system ( ) provides a user with the option of using either a Gaussian output or an imaged shaped output ( ).
Method And Apparatus For Scribing A Line In A Thin Film Using A Series Of Laser Pulses
US Patent:
7998838, Aug 16, 2011
Filed:
Nov 24, 2010
Appl. No.:
12/954385
Inventors:
Matthew Rekow - Santa Cruz CA, US
Richard Murison - St-Lazare, CA
Tullio Panarello - St-Lazare, CA
Corey Dunsky - Los Gatos CA, US
Richard Murison - St-Lazare, CA
Tullio Panarello - St-Lazare, CA
Corey Dunsky - Los Gatos CA, US
Assignee:
ESI-PyroPhotonics Lasers, Inc. - Dollard-des-Ormeaux, Quebec
International Classification:
H01L 21/00
US Classification:
438460, 372 25, 438458
Abstract:
A series of laser pulses in a pulse train, each pulse with a predetermined temporal power shape, scribes a line in a thin film of material on a substrate. The predetermined temporal pulse shape has a fast risetime and fast falltime and a pulse length between 10% power points of less than 10 ns. Scribing a line in the thin film is achieved by placing the series of laser pulse spots on the line to be scribed such that there is some overlapping area between adjacent laser pulse spots along the line. The use of a series of laser pulses with the predetermined pulse shape to scribe a line in the thin film results in a better quality and cleaner scribing process compared to that achieved with a conventional pulse shape.