Inventors:
Ming Ting Wu - Northridge CA, US
Young Kim - Sherman Oaks CA, US
Kieun Kim - Pasadena CA, US
Adam L. Cohen - Valley Village CA, US
Ananda H. Kumar - Fremont CA, US
Michael S. Lockard - Lake Elizabeth CA, US
Dennis R. Smalley - Newhall CA, US
Assignee:
Microfabrica Inc. - Van Nuys CA
International Classification:
C25D 5/02, C25D 5/10
Abstract:
Some embodiments of the invention are directed to electrochemical fabrication methods for forming structures or devices (e. g. microprobes for use in die level testing of semiconductor devices) from a core material and a shell or coating material that partially coats the surface of the structure. Other embodiments are directed to electrochemical fabrication methods for producing structures or devices (e. g. microprobes) from a core material and a shell or coating material that completely coats the surface of each layer from which the probe is formed including interlayer regions. Additional embodiments of the invention are directed to electrochemical fabrication methods for forming structures or devices (e. g. microprobes) from a core material and a shell or coating material wherein the coating material is located around each layer of the structure without locating the coating material in inter-layer regions. Each of these groups of embodiments incorporate both the core material and the coating material during the formation of each layer and each layer is also formed with a sacrificial material that is removed after formation of all layers of the structure.