MRS. YING LI, L.AC
Acupuncture in Saratoga, CA
License number
California 5307
Category
Acupuncture
Type
Acupuncturist
Address
Address
2
1848 Suite7 BUILDING 2, Saratoga, CA 95070
1458 Miller Ave, San Jose, CA 95129
1458 Miller Ave, San Jose, CA 95129
Phone
(408) 364-0968
Professional information
Ying Li, Saratoga CA
Specialties:
Acupuncturist
Address:
1848 Saratoga Ave, Saratoga, CA 95070
Ying Li, Saratoga CA - LAC
Specialties:
Acupuncture
Address:
1848 Saratoga Ave, Saratoga 95070
(408) 364-0968 (Phone), (408) 364-0968 (Fax)
(408) 364-0968 (Phone), (408) 364-0968 (Fax)
Languages:
English
Technique For Repairing A Reflective Photo-Mask
US Patent:
2014007, Mar 13, 2014
Filed:
Feb 11, 2013
Appl. No.:
13/764517
Inventors:
Ying Li - San Jose CA, US
Assignee:
LUMINESCENT TECHNOLOGIES, INC. - Palo Alto CA
International Classification:
G06F 17/50, G03F 1/00
US Classification:
430 5, 716 55, 716 50
Abstract:
During a calculation technique, a modification to a reflective photo-mask is calculated. In particular, using information specifying a defect associated with a location on a top surface of the reflective photo-mask, the modification to the reflective photo-mask is calculated. For example, the calculation may involve an inverse optical calculation in which a difference between a pattern associated with the reflective photo-mask at an image plane in a photo-lithographic process and a reference pattern at the image plane in the photo-lithographic process is used to calculate the modification at an object plane in the photo-lithographic process. Note that the modification includes a material added to the top surface of the reflective photo-mask using an additive fabrication process. Moreover, the modification is proximate to the location.