Inventors:
David Shafer - Fairfield CT, US
Wilhelm Ulrich - Aalen, DE
Aurelian Dodoc - Heidenheim, DE
Rudolf Von Buenau - Jena, DE
Hans-Juergen Mann - Oberkochen, DE
Alexander Epple - Aalen, DE
Susanne Beder - Aalen, DE
Wolfgang Singer - Rochester MN, US
International Classification:
G02B 17/08
Abstract:
A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D, a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP=D(Y′−NA) and wherein the condition COMP