WILLIAM O HAMBY
Engineering in Sandwich, MA
License number
Massachusetts 41111
Issued Date
Mar 25, 1999
Expiration Date
Jun 30, 2018
Type
Mechanical Engineer
Address
Address
Sandwich, MA 02563
Professional information
Mass Analysis Variable Exit Aperture
US Patent:
2012029, Nov 29, 2012
Filed:
May 17, 2012
Appl. No.:
13/474186
Inventors:
William O. Hamby - Sandwich MA, US
Joseph Valinski - Newmarket NH, US
Joseph Valinski - Newmarket NH, US
Assignee:
Axcelis Technologies, Inc. - Beverly MA
International Classification:
G21K 5/04
US Classification:
250282, 250288
Abstract:
A method and apparatus is provided for reducing unwanted isotopes of an ion implantation species from an ion beamline. The apparatus herein disclosed is a mass analysis variable exit aperture that selectively reduces the size of an exit aperture as seen by an ion beam. In one embodiment, the variable mass analysis exit aperture is located within a mass analyzer at a position upstream of a resolving aperture and effectively limits the size of an exit aperture so as to allow passage of desired implantation isotope(s) while blocking the passage of unwanted implantation isotopes. In one particular embodiment, the mass analysis variable exit aperture has a mechanical drive mechanism that enables a blocking structure to be moved into the path of an ion beam in a graduated fashion as guided by a control unit that operates based upon one or more characteristics of the ion beam.