William Kirtland Meyer
Engineers in Fairfax, VA
License number
Utah 8653352-2202
Issued Date
May 1, 2013
Expiration Date
Mar 31, 2017
Category
Engineer/Land Surveyor
Type
Professional Engineer
Address
Address
Fairfax, VA
Education
UNION COLLEGE, Jun 12, 1988
Professional information
Target Assembly For Ion Beam Sputter Deposition With Multiple Paddles Each Having Targets On Both Sides
US Patent:
6224718, May 1, 2001
Filed:
Jul 14, 1999
Appl. No.:
9/351856
Inventors:
William A. Meyer - Fairfax VA
Assignee:
Veeco Instruments, Inc. - Plainview NY
International Classification:
C23C 1434, C23C 1446
US Classification:
20419212
Abstract:
An ion beam sputtering target assembly has six sputter targets arranged in pairs on three paddles and disposed upon the circumference of a circular holder. The circular holder can be rotated about its axis in such a way as to bring any one of the target pairs to be exposed to the sputtering ion beam to deposit a film on substrate. The paddle is rotated to bring a desired target in the pair into position for sputtering. An alternative embodiment is provided with an enlarged region which allows one of the target paddles to be rotated about its axis while that target paddle is in an inactive, non-sputtering rotary position.