Inventors:
John T. Hawton - Colorado Springs CO
William G. Shumate - Colorado Springs CO
Assignee:
Hewlett-Packard Company - Palo Alto CA
International Classification:
C23C 1500
Abstract:
Placement of cylindrical magnets inside of a cylindrical cathode comprising a source of depositing material for sputter depositing of the material upon the interior surface of a substantially cylindrical workpiece, results in improved deposition rates, low power requirements, low workpiece temperatures and purity and cohesiveness in the deposited layer of material.