Inventors:
Steven J. Hillenius - Summit NJ
Joseph Lebowitz - Watchung NJ
Ruichen Liu - Warren NJ
William T. Lynch - Summit NJ
Assignee:
AT&T Bell Laboratories - Murray Hill NJ
International Classification:
H01L 2910, H01L 2702, H01L 2348
Abstract:
In CMOS based integrated circuits, stricter design rules require source and drain junctions shallower than 2500. ANG. By using a specific device configuration, a shallow junction is obtainable while resistance to latch-up is improved and other electrical properties, e. g. , low leakage current, are maintained. To achieve this result the p-channel device should have an activation energy of the junction reverse leakage current region less than 1. 12 eV, with a junction dopant region shallower than 1200. ANG. and a monotonically decreasing junction dopant profile.