TODD ANTHONY CURTIS, P.T.
Physical Therapy at Whitestone Blvd, Cedar Park, TX
License number
Texas 1088656
Category
Restorative Service Providers
Type
Physical Therapist
Address
Address
2
500 W Whitestone Blvd STE 101, Cedar Park, TX 78613
10430 Morado Cir APT 2333, Austin, TX 78759
10430 Morado Cir APT 2333, Austin, TX 78759
Phone
(512) 918-3000
(512) 909-2460
(512) 909-2460
Professional information
Todd Curtis, Austin TX - Teacher
Specialties:
Humanities
Work:
University of Texas - Austin TX
Trench Isolation Process To Deposit A Trench Fill Oxide Prior To Sidewall Liner Oxidation Growth
US Patent:
6387764, May 14, 2002
Filed:
Mar 31, 2000
Appl. No.:
09/541395
Inventors:
Todd O. Curtis - Austin TX
Vivek Rao - Austin TX
Kerem Kapkin - Watsonville CA
Vivek Rao - Austin TX
Kerem Kapkin - Watsonville CA
Assignee:
Silicon Valley Group, Thermal Systems LLC - Scotts Valley CA
International Classification:
H01L 21336
US Classification:
438296, 438404, 438424
Abstract:
This invention relates generally to a method of trench isolation used in the fabrication of semiconductor devices, wafers and the like. More specifically, the present invention related to a method of trench isolation using chemical vapor deposition (CVD) with TEOS and ozone to deposit a trench fill oxide prior to growing a thermal oxide layer or liner on sidewalls of the trench. The method provides void-free as-deposited dielectric CVD films into gaps or trenches with non-vertical, vertical and or re-entrant profiles.
Todd Anthony Curtis, Cedar Park TX
Specialties:
Physical Therapist
Address:
500 W Whitestone Blvd, Cedar Park, TX 78613
Todd A Curtis, Cedar Park TX - PT (Physical therapy)
Specialties:
Physical Therapy
Address:
500 W Whitestone Blvd STE 101, Cedar Park 78613
(512) 918-3000 (Phone)
(512) 918-3000 (Phone)
Languages:
English