TIMOTHY M PULLING
Broker in Franklin, MA
License number
Massachusetts 9056311
Issued Date
Jun 24, 2003
Expiration Date
Aug 26, 2007
Type
Salesperson
Address
Address
Franklin, MA 02038
Professional information
Purge And Rough Cryopump Regeneration Process, Cryopump And Controller
US Patent:
5862671, Jan 26, 1999
Filed:
May 2, 1997
Appl. No.:
8/848973
Inventors:
Philip A. Lessard - Boxborough MA
Paul E. Dresens - Arlington MA
Maureen C. Buonpane - Mansfield MA
Timothy M. Pulling - Franklin MA
Alan C. Brightman - Bridgewater MA
Robert M. Patterson - Burlington MA
Mark A. Stira - Wilmington MA
Allen J. Bartlett - Mendon MA
Stephen J. Yamartino - Wayland MA
Gary S. Ash - Walpole MA
James A. O'Neil - Bedford MA
Paul E. Dresens - Arlington MA
Maureen C. Buonpane - Mansfield MA
Timothy M. Pulling - Franklin MA
Alan C. Brightman - Bridgewater MA
Robert M. Patterson - Burlington MA
Mark A. Stira - Wilmington MA
Allen J. Bartlett - Mendon MA
Stephen J. Yamartino - Wayland MA
Gary S. Ash - Walpole MA
James A. O'Neil - Bedford MA
Assignee:
Helix Technology Corporation - Mansfield MA
International Classification:
B01D 800
US Classification:
62 555
Abstract:
A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator is turned on. If the system fails a rough test after roughing at the lower temperature, it is repurged with the rough valve open.