TIMOTHY J CAMPBELL
Vehicle Board in Allentown, PA
License number
Pennsylvania MV123729L
Category
Vehicle Board
Type
Vehicle Salesperson
Address
Address
Allentown, PA 18104
Professional information
Semiconductor Device Contamination Reduction In A Fluorinated Oxide Deposition Process
US Patent:
2005019, Sep 1, 2005
Filed:
Jan 20, 2005
Appl. No.:
11/039354
Inventors:
Leonard Olmer - Orlando FL, US
Thomas Lahey - Windermere FL, US
Timothy Campbell - Allentown PA, US
Robert Schanzer - Orlando FL, US
David Shuttleworth - Orlando FL, US
Thomas Lahey - Windermere FL, US
Timothy Campbell - Allentown PA, US
Robert Schanzer - Orlando FL, US
David Shuttleworth - Orlando FL, US
International Classification:
B05D001/36, B05D007/00, H01L021/4763, H01L021/31, H01L021/469
US Classification:
438763000, 427419300, 438761000, 438781000, 438784000
Abstract:
A method for improving throughput in a semiconductor wafer deposition process in a high density plasma chamber includes processing a first wafer in the high density plasma chamber using a process that includes high power sufficient to burn fluorosilicate glass residue in the chamber. The method further includes removing the first wafer and processing additional wafers using the same process without cleaning the chamber between wafers.