Inventors:
Lisa McElwee-White - Gainesville FL
Timothy J. Anderson - Gainesville FL
Steven W. Johnston - San Jose CA
Carlos G. Ortiz - Houston TX
Omar J. Bchir - Gainesville FL
Assignee:
University of Florida - Gainesville FL
International Classification:
C07F 1100
US Classification:
556 59, 556 57, 546 2, 549206, 427255394, 427593, 106 105, 106 122, 106 125
Abstract:
Single imido tungsten imido precursors are described for the deposition of tungsten nitride on a substrate by processes such as metal organic chemical vapor deposition. The precursors may be employed to form diffusion barrier layers on microelectronic devices. A method for forming tungsten nitride layers includes the steps of providing a tungsten imido species having the formula L W(NR)X , where R is a carbon containing group, y is an integer between 0 and 5, n is an integer between 0 and 4 and L and X are selected from the group of non-imido ligands. The single imido tungsten imido species is flowed to a surface of a substrate where the single imido tungsten imido species decomposes to form a tungsten nitride layer.