Inventors:
Gianluca Piazza - Philadelphia PA, US
Nipun Sinha - Philadelphia PA, US
Timothy S. Jones - Fort Worth TX, US
Zhijun Guo - Philadelphia PA, US
Graham E. Wabiszewski - Philadelphia PA, US
Robert Carpick - Philadelphia PA, US
Andre Dehon - Philadelphia PA, US
Assignee:
The Trustees Of The University of Pennsylvania - Philadelphia PA
International Classification:
H01L 41/09, H01H 57/00
Abstract:
Systems and methods for operating piezoelectric switches are disclosed. A piezoelectric switching system includes a first actuator, a second actuator, and a bias voltage source. The first actuator has a first body electrode, a first gate electrode, and a first contact region. The second actuator has a second body electrode, a second gate electrode, and a second contact region. The first and second contact regions are separated by a gap. The bias voltage source applies a bias voltage to the body electrodes. The bias voltage is lower in magnitude than an actuation voltage for the switch. The gate electrodes receive a switching voltage. The switching voltage causes at least one of the first and second actuators to bend, thereby closing the gap such that the second contact region electrically contacts the first contact region. The difference between the switching voltage and the bias voltage exceeds the actuation voltage of the switch.