THUY KIM TA
Cosmetology at Cadoz Dr, Austin, TX
License number
Texas 1638381
Expiration Date
Aug 15, 2018
Category
Cosmetologist
Address
Address
15305 Cadoz Dr, Austin, TX 78728
Phone
(512) 584-1790
Professional information
Method Of Etching Anti-Reflection Coating
US Patent:
5308742, May 3, 1994
Filed:
Jun 3, 1992
Appl. No.:
7/893178
Inventors:
Thuy B. Ta - Austin TX
Assignee:
AT&T Bell Laboratories - Murray Hill NJ
International Classification:
G03C 500
US Classification:
430313
Abstract:
A polyimide layer used in manufacturing semiconductor integrated circuits is etched in a plasma comprising O. sub. 2, Ar, and CHF. sub. 3. The plasma produces excellent critical dimension control and yields good resist to polyimide etching selectivity.