Inventors:
Kazuaki Takano - Santa Rosa CA, US
Andrew John Church - Santa Rosa CA, US
Thomas R. Jones - Santa Rosa CA, US
Brad Scott Tarter - Santa Rosa CA, US
Assignee:
JDS Uniphase Corporation - Milpitas CA
International Classification:
G02B 1/10
Abstract:
A conductive anti-reflection coating has a surface quarterwave layer that is broken up into smaller portions by inserting one or more thin layers of conductive material in the dielectric material. The resulting stack of alternating layers of a dielectric material and an electrically conductive material provides a solid electrical contact to the buried conductive layer and exhibits a low surface contact resistance.