Inventors:
Taiji Ema - Kawasaki, JP
Edward J. Swenson - Portland OR
Thomas W. Richardson - Portland OR
Yunlong Sun - Portland OR
Assignee:
Fujitsu Limited - Kawasaki
Electro Scientific Industries Incorporated - Portland OR
International Classification:
H01L 2144
Abstract:
The semiconductor device includes a blocking layer formed on a substrate , an insulation film formed on the blocking layer , and a fuse formed on the insulation film. The blocking layer is formed below the fuse , whereby the fuse is disconnected by laser ablation, and the laser ablation can be stopped by the blocking layer with good controllability without damaging the substrate. The fuses to be disconnected can be arranged at a very small pitch, which can improve integration of the fuse circuit.