Inventors:
Thomas R. Werner - Argonne IL
Charles M. Falco - Tucson AZ
Ivan K. Schuller - Woodridge IL
Assignee:
The United States of America as represented by the United States
Department of Energy - Washington DC
International Classification:
H01C 1000
Abstract:
A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.