DR. THANH H NGUYEN, PHARMD
Pharmacy at Hermocilla Way, San Jose, CA

2013025, Oct 3, 2013

Mar 30, 2012

13/435766

ALAN RITCHIE - Menlo Park CA, US
DONNY YOUNG - Cupertino CA, US
WEI W. WANG - Santa Clara CA, US
ANANTHKRISHNA JUPUDI - Milpitas CA, US
THANH X. NGUYEN - San Jose CA, US
KIRANKUMAR SAVANDAIAH - Bangalore, IN

APPLIED MATERIALS, INC. - Santa Clara CA

C23C 14/34

20429808

Apparatus for processing substrates are provided herein. In some embodiments, an apparatus for processing a substrate includes a substrate support that may include a dielectric member having a surface to support a substrate thereon; one or more first conductive members disposed below the dielectric member and having a dielectric member facing surface adjacent to the dielectric member; and a second conductive member disposed about and contacting the one or more first conductive members such that RF energy provided to the substrate by an RF source returns to the RF source by traveling radially outward from the substrate support along the dielectric member facing surface of the one or more first conductive members and along a first surface of the second conductive member disposed substantially parallel to a peripheral edge surface of the one or more first conductive members after travelling along the dielectric layer facing surface.

2012002, Feb 2, 2012

Jul 25, 2011

13/189992

ZHENDONG LIU - San Jose CA, US
YONG CAO - San Jose CA, US
XIANMIN TANG - San Jose CA, US
SRINIVAS GANDIKOTA - Santa Clara CA, US
THANH NGUYEN - San Jose CA, US
MUHAMMAD RASHEED - San Jose CA, US

APPLIED MATERIALS, INC. - Santa Clara CA

C23C 14/35

427571, 118722

Methods and apparatus for depositing thin films having high thickness uniformity and low resistivity are provided herein. In some embodiments, a magnetron assembly includes a shunt plate, the shunt plate rotatable about an axis, an inner closed loop magnetic pole coupled to the shunt plate, and an outer closed loop magnetic pole coupled the shunt plate, wherein an unbalance ratio of a magnetic field strength of the outer closed loop magnetic pole to a magnetic field strength of the inner closed loop magnetic pole is less than about 1. In some embodiments, the ratio is about 0.57. In some embodiments, the shunt plate and the outer close loop magnetic pole have a cardioid shape. A method utilizing RF and DC power in combination with the inventive magnetron assembly is also disclosed.