Inventors:
Raymond Roger Shile - Los Gatos CA, US
Terrisa Duenas - Ventura CA, US
John Edward Bussan - Naperville IL, US
Gregory J. Athas - Lisle IL, US
Joseph S. Fragala - San Jose CA, US
Jason R. Haaheim - Chicago IL, US
Sylvain Cruchon-Dupeyrat - Chicago IL, US
Jeffrey R. Rendlen - Glen Ellyn IL, US
Assignee:
Nanolnk, Inc. - Skokie IL
International Classification:
H01L 21/02
Abstract:
Improved actuated probes suitable for scanning probe lithography or microscopy, and especially direct-write nanolithography and method of fabrication thereof. In one embodiment, thermomechanically actuated cantilevers with oxide-sharpened microcast tips are inexpensively fabricated by a process that comprises low-temperature wafer bonding, such as (gold) thermocompressive bonding, eutectic or adhesive bonding. Also provided is a flexcircuit that electrically interconnects the actuated probes to external circuitry and mechanically couples them to the instrument actuator. An improved scanning probe lithography instrument, hardware and software, can be built around the actuated cantilevers and the flexcircuit. Finally, provided is an improved microfluidic circuit to deliver chemical compounds to the tips of (actuated) probes and a fabrication method for tall, high-aspect-ratio tips.