Inventors:
Kevin Moeggenborg - Naperville IL, US
John Clark - Montgomery IL, US
Jeffrey Gilliland - Montgomery IL, US
Stanley Lesiak - Naperville IL, US
Susan Wilson - Yorkville IL, US
Vlasta Brusic - Geneva IL, US
Assignee:
Cabot Microelectronics Corporation - Aurora IL
International Classification:
B24B 13/00
US Classification:
451 41, 451 37, 451 57, 451 60, 451 79, 451 81, 451 92, 451142, 451297, 451526, 451534, 451539
Abstract:
The invention is directed to a method of polishing a surface of an object that includes aluminum. The method includes the step of contacting the surface of the object with a soft polishing pad and a polishing composition. The polishing composition includes abrasive particles, an agent that oxidizes aluminum, and a liquid carrier to polish the surface of the object. The polishing composition includes the abrasive particles suspended in the liquid carrier, and is applied at a pH above about 7.