Inventors:
Paul R. Besser - Sunnyvale CA
Paul L. King - Mountain View CA
Susan Kim - Austin TX
Assignee:
Advanced Micro Devices, Inc. - Austin TX
International Classification:
C23C 1434
US Classification:
20419213, 20419215, 427 9, 427585, 427576, 427404, 438197, 438199, 438283
Abstract:
The present invention is directed to a method of controlling the formation of metal layers. In one illustrative embodiment, the method comprises depositing a layer of metal above a structure, irradiating at least one area of the layer of metal, and analyzing an x-ray spectrum of x-rays leaving the irradiated area to determine a thickness of the layer of metal. In further embodiments of the present invention, a plurality of areas, and in some cases at least five areas, of the layer of metal are irradiated. The layer of metal may be comprised of, for example, titanium, cobalt, nickel, copper, tantalum, etc.