Inventors:
Thomas N. Jackson - State College PA, US
Kyusun Choi - State College PA, US
Richard L. Tutwiler - Port Matilda PA, US
In Soo Kim - State College PA, US
Hyun Soo Kim - University Park PA, US
Sung Kyu Park - State College PA, US
Ioanna G. Mina - State College PA, US
Assignee:
The Penn State Research Foundation - University Park PA
International Classification:
H01L 41/08
Abstract:
An example ultrasound device, such as a transducer array, includes a plurality of ultrasound transducers, each ultrasound transducer having a first electrode, a second electrode, a thin piezoelectric film located between the electrodes, and a substrate supporting the plurality of ultrasound transducers. In some examples, the electrode separation is less than 10 microns, facilitating lower voltage operation than conventional ultrasound transducers.