Inventors:
Cathy L. Cowan - San Jose CA
Stephen Y. Lau - San Leandro CA
Assignee:
Semi-Gas Systems, Inc. - San Jose CA
International Classification:
B01D 4600, B01D 3502
Abstract:
A filter-purifier that removes particles as well as trace amounts of moisture, oxygen, and other chemical impurities from a gas stream. The filter-purifier includes a removable canister that contains a purifying medium and a pair of sealing poppet valves that automatically close when the canister is removed from an in-line block body. The block body includes gas line fittings with close gland-to-gland separations, since the canister is off to one side and not positioned directly in line between the glands.