MR. STEPHEN DAVIS, LAC
Acupuncture at Macarthur Blvd, Oakland, CA
License number
California 16457
Category
Acupuncture
Type
Acupuncturist
Address
Address
255 Macarthur Blvd APT B, Oakland, CA 94610
Phone
(510) 214-3480
Professional information
Process For Etching Sloped Vias In Polyimide Insulators
US Patent:
4369090, Jan 18, 1983
Filed:
Nov 6, 1980
Appl. No.:
6/204409
Inventors:
Arthur M. Wilson - Richardson TX
David W. Laks - Dallas TX
Stephen M. Davis - Oakland CA
David W. Laks - Dallas TX
Stephen M. Davis - Oakland CA
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
B44C 122, C03C 1500, C03C 2506
US Classification:
156644
Abstract:
A method for the fabrication of a cured polyamic acid film having apertures therein selectively etched to provide sidewalls sloped at a controlled angle. Such films are used in the fabrication of integrated circuits having two or more levels of metallization, to provide electrical insulation between metal levels. The apertures therein are required to have sloped sidewalls in order to enhance the yields of circuits having reliable contact between metal levels.