Inventors:
Arthur M. Wilson - Richardson TX
David W. Laks - Dallas TX
Stephen M. Davis - Oakland CA
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
B44C 122, C03C 1500, C03C 2506
Abstract:
A method for the fabrication of a cured polyamic acid film having apertures therein selectively etched to provide sidewalls sloped at a controlled angle. Such films are used in the fabrication of integrated circuits having two or more levels of metallization, to provide electrical insulation between metal levels. The apertures therein are required to have sloped sidewalls in order to enhance the yields of circuits having reliable contact between metal levels.