Stephen Curtis Miller
Electrician at Colony Hl Ln, Fort Collins, CO
License number
Colorado 9930703
Issued Date
Nov 8, 2012
Renew Date
Nov 8, 2012
Type
Electrical Apprentice
Address
Address
6757 Colony Hills Ln, Fort Collins, CO 80525
Personal information
See more information about Stephen Curtis Miller at radaris.comName
Address
Phone
4801 63Rd St, Boulder, CO 80301
Professional information
R&Amp;D Engineer At Avago Technologies
Position:
R&D Engineer at Avago Technologies
Location:
Fort Collins, Colorado Area
Industry:
Semiconductors
Work:
Avago Technologies
-
R&D Engineer
Fbar Mass Loading Process Using Selective Dry Etching
US Patent:
2004018, Sep 30, 2004
Filed:
Mar 31, 2003
Appl. No.:
10/403368
Inventors:
David Hula - Fort Collins CO, US
Carrie Guthrie - Fort Collins CO, US
Ronnie Varghese - Fort Collins CO, US
Stephen Miller - Fort Collins CO, US
Jennifer Bradford - Corvallis OR, US
Carrie Guthrie - Fort Collins CO, US
Ronnie Varghese - Fort Collins CO, US
Stephen Miller - Fort Collins CO, US
Jennifer Bradford - Corvallis OR, US
International Classification:
H03H009/54
US Classification:
333/188000, 333/189000, 310/312000
Abstract:
A method and apparatus is presented. The method produces a Film Bulk Acoustic Resonator (FBAR) structure. A piezoelectric layer is provided and a series of manufacturing steps are performed to deposit a thin mass-load layer above the piezoelectric layer. Further, an electrode material is deposited on the thin mass-load layer after portions of the thin mass-load layer have been removed. The electrode material includes a non-mass-loaded region positioned above the piezoelectric layer and a mass-loaded region positioned above the mass-load layer.