Stephen Allan Miller
Accountancy at Independence Rd, Fort Collins, CO
License number
Colorado 8793
Issued Date
Aug 30, 1984
Renew Date
Oct 28, 2013
Expiration Date
Nov 30, 2015
Type
Certified Public Accountant
Address
Address
1640 Independence Rd, Fort Collins, CO 80526
Professional information
R&Amp;D Engineer At Avago Technologies
Position:
R&D Engineer at Avago Technologies
Location:
Fort Collins, Colorado Area
Industry:
Semiconductors
Work:
Avago Technologies
-
R&D Engineer
Fbar Mass Loading Process Using Selective Dry Etching
US Patent:
2004018, Sep 30, 2004
Filed:
Mar 31, 2003
Appl. No.:
10/403368
Inventors:
David Hula - Fort Collins CO, US
Carrie Guthrie - Fort Collins CO, US
Ronnie Varghese - Fort Collins CO, US
Stephen Miller - Fort Collins CO, US
Jennifer Bradford - Corvallis OR, US
Carrie Guthrie - Fort Collins CO, US
Ronnie Varghese - Fort Collins CO, US
Stephen Miller - Fort Collins CO, US
Jennifer Bradford - Corvallis OR, US
International Classification:
H03H009/54
US Classification:
333/188000, 333/189000, 310/312000
Abstract:
A method and apparatus is presented. The method produces a Film Bulk Acoustic Resonator (FBAR) structure. A piezoelectric layer is provided and a series of manufacturing steps are performed to deposit a thin mass-load layer above the piezoelectric layer. Further, an electrode material is deposited on the thin mass-load layer after portions of the thin mass-load layer have been removed. The electrode material includes a non-mass-loaded region positioned above the piezoelectric layer and a mass-loaded region positioned above the mass-load layer.