STEPHEN A MACLEOD
Broker in Mansfield, MA
License number
Massachusetts 51808
Expiration Date
Jul 4, 1996
Type
Salesperson
Address
Address
Mansfield, MA 02048
Professional information
Wafer Edge Detection And Capacitive Probe Therefor
US Patent:
2008029, Nov 27, 2008
Filed:
May 25, 2007
Appl. No.:
11/807235
Inventors:
Roy Mallory - Bedford MA, US
Jaydeep Kumar Sinha - Mansfield MA, US
Stephen MacLeod - Mansfield MA, US
Jaydeep Kumar Sinha - Mansfield MA, US
Stephen MacLeod - Mansfield MA, US
International Classification:
G01R 27/26
US Classification:
324690
Abstract:
A wafer edge detection system comprising a probe assembly having one or more capacitive plates conforming in edge shape to an edge shape of a wafer; and processing electronics for electronically driving the one or more capacitive plates and for sensing an electrical signal representing capacitance between each one or more plates and the wafer. Filtering and demodulation techniques enhance the signal to noise ratio.