Inventors:
Simon S. Cohen - Burlington MA
Jack I. Raffel - Lexington MA
Peter W. Wyatt - Lincoln MA
Assignee:
Massachusetts Institute of Technology - Cambridge MA
International Classification:
H01L 2182
Abstract:
Methods and systems are discussed for fabricating electrically programmable link structures by fabricating a first metal conductor of a refractory conductive material, composite, or an aluminum alloy which has been modified with a refractory material, then fabricating an insulating link material over the first conductor, and subsequently, depositing a second conductor over the link material. In use, an electrical path can be formed between the first and second conductors by applying a voltage between such conductors across at least one selected region of the insulator, such that the insulating link material is transformed in the region and rendered conductive to form an electrical signal path.