SHU RONG JIN
Massage Therapy at Evelyn Ave Ap, Sunnyvale, CA
License number
Florida 75593
Issued Date
Mar 5, 2014
Effective Date
Mar 5, 2014
Expiration Date
Aug 31, 2017
Category
Health Care
Type
Massage Therapist
Address
Address
2
295 E Evelyn Ave #319, Sunnyvale, CA 94086
1671 NE 163Rd St, Miami, FL 33162
1671 NE 163Rd St, Miami, FL 33162
Professional information
High Density Plasma Physical Vapor Deposition
US Patent:
5792522, Aug 11, 1998
Filed:
Sep 18, 1996
Appl. No.:
8/715109
Inventors:
Shu Jin - Sunnyvale CA
Xiao Chun Mu - Saratoga CA
Xing Chen - Cambridge MA
Lawrence Bourget - Reading MA
Xiao Chun Mu - Saratoga CA
Xing Chen - Cambridge MA
Lawrence Bourget - Reading MA
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H05H 130
US Classification:
427575
Abstract:
A method for forming a material in an opening on a substrate, such as a wafer, using an electron cyclotron resonance-assisted high density plasma physical vapor deposition system. The method comprises the steps of: maintaining a pressure in the range of approximately 1 mTorr to approximately 6 mTorr; generating a plasma by providing a microwave power in the range of approximately 3 kilowatts (kW) to approximately 5 kW; applying a direct current (DC) voltage to a target source of the material in the range of approximately (negative) -600 volts to approximately -1000 volts; providing a current of a predetermined amount to a first electromagnet; and providing a current to a second electromagnet that is less than said predetermined amount, wherein said second electromagnet is disposed below said first electromagnet; and forming a layer of the material in the opening.