Inventors:
Stephen Abney - San Martin CA, US
Anthony Vesci - San Jose CA, US
Joseph F. Sommers - San Jose CA, US
Marc O'Donnell Schweitzer - San Jose CA, US
Scott Dickerson - Lakewood CO, US
Jennifer Watia Tiller - Santa Clara CA, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
B21D 22/16, B21D 17/02
Abstract:
A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.