SCOTT DAVID RUBY
Pilots at Sand Hl Dr, Durham, ME
License number
Maine A1637905
Issued Date
Jun 2015
Expiration Date
Jun 2017
Category
Airmen
Type
Authorized Aircraft Instructor
Address
Address
34 Sand Hill Dr, Durham, ME 04222
Professional information
System And Method For Manufacturing An Emitter Structure In A Complementary Bipolar Cmos Transistor Manufacturing Process
US Patent:
7678657, Mar 16, 2010
Filed:
Nov 2, 2006
Appl. No.:
11/591850
Inventors:
Todd Patrick Thibeault - Gorham ME, US
Steven J. Adler - Cape Elizabeth ME, US
Scott David Ruby - Durham ME, US
Steven J. Adler - Cape Elizabeth ME, US
Scott David Ruby - Durham ME, US
Assignee:
National Semiconductor Corporation - Santa Clara CA
International Classification:
H01L 21/44
US Classification:
438343, 438309
Abstract:
A system and method are disclosed for manufacturing an emitter structure in a complementary bipolar complementary metal oxide semiconductor (CBiCMOS) transistor manufacturing process. A protective layer is formed over an emitter layer in a transistor structure and lateral portions of the protective layer and the emitter layer are etched to form an emitter structure. An oxide layer is then deposited over the transistor structure and an etchback process is performed to remove portions of the oxide layer from the top of the protective layer. A source/drain implant process is then performed to implant an extrinsic base region of the transistor. The protective layer protects the emitter structure from the implant process. Then the protective layer is removed from the emitter structure.