Inventors:
John H. GOODEMOTE - Sauquoit NY, US
Ryan J. CUMMISKEY - Clay NY, US
Dennis C. STIMSON - Baldwinsville NY, US
David A. RUGGLES - San Antonio TX, US
Assignee:
LOCKHEED MARTIN CORPORATION - Bethesda MD
International Classification:
H01L 41/113, H04R 31/00, H01L 41/053
Abstract:
A sensor includes a first plate, a second plate, and a piezoelectric material portions. The piezoelectric material portions are positioned between the first plate and the second plate. The area of the piezoelectric material portions is less than the area of the plates. The plates can be supported with a center support structure. The width of the sensor is significantly greater than its height. The interstitial space is filled with a flexible material. An outside wall isolates the inside from the outside