Inventors:
Ryan Murdick - Ann Arbor MI, US
Lukas Novotny - Pittsford NY, US
Assignee:
RHK Technology , Inc. - Trot MI
International Classification:
G01Q 30/02
Abstract:
An embodiment includes an integrated microscope including scanning probe microscopy (SPM) hardware integrated with optical microscopy hardware, and other embodiments include related methods and devices.