Inventors:
Russell N. Wells - Santa Clara CA
Assignee:
General Signal Corp. - Stamford CT
International Classification:
G03B 2752
Abstract:
A table stabilization assembly is disclosed. The assembly is intended for use in a microlithography system which includes a stable for supporting a movable stage and a frame support for supporting the table. The assembly includes a pair of brake leaves which are respectively attached to the table and frame support and which are clamped together during stage acceleration or deceleration to provide stabilization.