Inventors:
Ronald W. Laconto - Leicester MA, US
Andrew G. Haerle - Sutton MA, US
Assignee:
Saint-Gobain Ceramics & Plastics, Inc. - Worcester MA
International Classification:
B24D 3/06
US Classification:
451559, 51309, 428404, 451 36, 451 41
Abstract:
A polishing slurry includes liquid medium and particulate abrasive. The particulate abrasive includes soft abrasive particles, hard abrasive particles, and colloidal silica particles, wherein the soft abrasive particles have a Mohs hardness of not greater than 8 and the hard abrasive particles have a Mohs hardness of not less than 8, and wherein the soft abrasive particles and the hard abrasive particles are present at a weight ratio of not less than 2:1.