Inventors:
Mukul Saran - Richardson TX
Charles A. Martin - Melissa TX
Ronald H. Cox - Plano TX
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
H01L 2352
US Classification:
257758, 257750, 257763, 257786, 257773, 257774, 257775
Abstract:
A reinforcing system and method of fabrication for a semiconductor integrated circuit bond pad comprises a first dielectric layer or stack disposed under the bond pad; at least one second dielectric layer or stack disposed under the first dielectric layer; and a reinforcing metal structure disposed into the second dielectric layer such that the patterns of the metal structure and the second dielectric layer comprise a uniformly flat interface towards the first dielectric layer. The patterns of the metal structure and the second dielectric layer comprise feature sizes and fine pitches used in the integrated circuit.